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"Active Control of a Pneumatic Vibration Isolation Table using a Newly ..."
Tomonori Kato et al. (2007)
- Tomonori Kato, Kenji Kawashima, Tatsuya Funaki, Harus Laksana Gunter, Toshiharu Kagawa:
Active Control of a Pneumatic Vibration Isolation Table using a Newly Developed Precise and High Response Pressure Regulator. CCA 2007: 497-502
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