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"Reduction of cross-coupling between X-Y axes of piezoelectric scanner ..."

Habibullah et al. (2013)

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DOI: 10.1109/CCA.2013.6662791

access: closed

type: Conference or Workshop Paper

metadata version: 2020-10-25

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  - conf/IEEEcca/HabibullahPPR13
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Habibullah, Hemanshu Roy Pota, Ian R. Petersen, M. S. Rana:
Reduction of cross-coupling between X-Y axes of piezoelectric scanner stage of atomic force microscope for faster scanning. CCA 2013: 455-460

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