"Front to backside alignment for TSV based 3D integration."

Frank Windrich, Andreas Schenke (2013)

> Home

Details and statistics

DOI: 10.1109/3DIC.2013.6702371

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-15

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/3dic/WindrichS13
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/3dic/WindrichS13
Frank Windrich, Andreas Schenke:
Front to backside alignment for TSV based 3D integration. 3DIC 2013: 1-6

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.