"Hydrolysis-Tolerant Hybrid Bonding in Ambient Atmosphere for 3D Integration."

Akitsu Shigetou, Tilo H. Yang, C. Robert Kao (2019)

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DOI: 10.1109/3DIC48104.2019.9058786

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-19

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Akitsu Shigetou, Tilo H. Yang, C. Robert Kao:
Hydrolysis-Tolerant Hybrid Bonding in Ambient Atmosphere for 3D Integration. 3DIC 2019: 1-3

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