"Low temperature Au-Au bonding with VUV/O3 treatment."

Akiko Okada et al. (2011)

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DOI: 10.1109/3DIC.2012.6263015

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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  - conf/3dic/OkadaNUSNSMS11
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  - https://dblp.org/rec/conf/3dic/OkadaNUSNSMS11
Akiko Okada, Masatsugu Nimura, Naoko Unami, Akitsu Shigetou, Hirokazu Noma, Katsuyuki Sakuma, Jun Mizuno, Shuichi Shoji:
Low temperature Au-Au bonding with VUV/O3 treatment. 3DIC 2011: 1-5

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