"Effect of frequency in the 3D integration of a PZT-actuated MEMS switch ..."

Fumihiko Nakazawa et al. (2011)

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DOI: 10.1109/3DIC.2012.6263007

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Fumihiko Nakazawa, Takeaki Shimanouchi, Tadashi Nakatani, Takashi Katsuki, Hisao Okuda, Osamu Toyoda, Satoshi Ueda:
Effect of frequency in the 3D integration of a PZT-actuated MEMS switch using a single crystal silicon asymmetric beam. 3DIC 2011: 1-5

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