"Growth Optimization of Multi-Layer Graphene for Thermal-TSV Application in ..."

Mariappan Murugesan, Mitsumasa Koyanagi, Takafumi Fukushima (2019)

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DOI: 10.1109/3DIC48104.2019.9058853

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-04

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Mariappan Murugesan, Mitsumasa Koyanagi, Takafumi Fukushima:
Growth Optimization of Multi-Layer Graphene for Thermal-TSV Application in 3D-LSI. 3DIC 2019: 1-5

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