Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"Effect of CVD Mn oxide layer as Cu diffusion barrier for TSV."

Mariappan Murugesan et al. (2013)

> Home

Details and statistics

DOI: 10.1109/3DIC.2013.6702364

access: closed

type: Conference or Workshop Paper

metadata version: 2021-02-16

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/3dic/MurugesanBLFTKSWK13
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/3dic/MurugesanBLFTKSWK13
Mariappan Murugesan, Jichoel Bea, Kang Wook Lee, Takafumi Fukushima, Tetsu Tanaka, Mitsumasa Koyanagi, Yuji Sutou, H. Wang, J. Koike:
Effect of CVD Mn oxide layer as Cu diffusion barrier for TSV. 3DIC 2013: 1-4

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.