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"Effect of CVD Mn oxide layer as Cu diffusion barrier for TSV."
Mariappan Murugesan et al. (2013)
- Mariappan Murugesan, Jichoel Bea, Kang Wook Lee, Takafumi Fukushima
, Tetsu Tanaka
, Mitsumasa Koyanagi, Yuji Sutou
, H. Wang, J. Koike:
Effect of CVD Mn oxide layer as Cu diffusion barrier for TSV. 3DIC 2013: 1-4
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