"Development of high accuracy wafer thinning and pickup technology for thin ..."

Chuichi Miyazaki et al. (2010)

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DOI: 10.1109/3DIC.2010.5751470

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Chuichi Miyazaki, Haruo Shimamoto, Toshihide Uematsu, Yoshiyuki Abe, Kosuke Kitaichi, Tadahiro Morifuji, Shoji Yasunaga:
Development of high accuracy wafer thinning and pickup technology for thin wafer. 3DIC 2010: 1-4

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