"TSV development for miniaturized MEMS acceleration switch."

Nicolas Lietaer et al. (2010)

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DOI: 10.1109/3DIC.2010.5751457

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Nicolas Lietaer, Anand Summanwar, Thor Bakke, Maaike Taklo, Per Dalsjø:
TSV development for miniaturized MEMS acceleration switch. 3DIC 2010: 1-4

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