"Hot spots suppression by high thermal conductivity film in thin-sub strate ..."

Fumiki Kato et al. (2011)

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DOI: 10.1109/3DIC.2012.6263005

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-02

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Fumiki Kato, Katsuya Kikuchi, Hiroshi Nakagawa, Masahiro Aoyagi:
Hot spots suppression by high thermal conductivity film in thin-sub strate CMOS ICs for 3D integration. 3DIC 2011: 1-4

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