"TSV optimization for BEOL interconnection in logic process."

Sinwoo Kang et al. (2011)

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DOI: 10.1109/3DIC.2012.6262947

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Sinwoo Kang, Sungdong Cho, Kiyoung Yun, Sangwook Ji, Kisoon Bae, Woonseob Lee, Eunji Kim, Jangho Kim, Jonghoon Cho, Hyongyol Mun, Yeong L. Park:
TSV optimization for BEOL interconnection in logic process. 3DIC 2011: 1-4

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