"Copper deep via superfilling by selective accelerator deactivation."

Masanori Hayase, Naoki Mizukoshi, Masayuki Nagao (2011)

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DOI: 10.1109/3DIC.2012.6262982

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Masanori Hayase, Naoki Mizukoshi, Masayuki Nagao:
Copper deep via superfilling by selective accelerator deactivation. 3DIC 2011: 1-4

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