"Path to 3D heterogeneous integration."

Daniel S. Green et al. (2015)

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DOI: 10.1109/3DIC.2015.7334469

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Daniel S. Green, Carl L. Dohrman, Jeffrey Demmin, Tsu-Hsi Chang:
Path to 3D heterogeneous integration. 3DIC 2015: FS7.1-FS7.3

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