"SiGe BiCMOS Technology with Embedded Microchannels based on Cu Pillar PCB ..."

Emre Can Durmaz et al. (2023)

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DOI: 10.1109/3DIC57175.2023.10155073

access: closed

type: Conference or Workshop Paper

metadata version: 2023-07-10

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Emre Can Durmaz, Carl Heine, Zhibo Cao, Jens Lehmann, Dietmar Kissinger, Matthias Wietstruck:
SiGe BiCMOS Technology with Embedded Microchannels based on Cu Pillar PCB Integration Enabling sub-THz Microfluidic Sensor Applications. 3DIC 2023: 1-4

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