"Surface Modification for Ultrasonic Cu-to-Cu Direct Bonding."

Chih-Hsien Chiu, Wei-Ting Chen, Jenn-Ming Song (2024)

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DOI: 10.1109/3DIC63395.2024.10830091

access: closed

type: Conference or Workshop Paper

metadata version: 2025-01-23

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Chih-Hsien Chiu, Wei-Ting Chen, Jenn-Ming Song:
Surface Modification for Ultrasonic Cu-to-Cu Direct Bonding. 3DIC 2024: 1-4

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