"Substrate monitoring system for inspecting defects in TSV-based data buses."

Yuuki Araga, Kikuchi Katsuya, Masahiro Aoyagi (2014)

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DOI: 10.1109/3DIC.2014.7152179

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Yuuki Araga, Kikuchi Katsuya, Masahiro Aoyagi:
Substrate monitoring system for inspecting defects in TSV-based data buses. 3DIC 2014: 1-5

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