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Sigeru Hayama

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1990 – 1999

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1991
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Yoshihiko Hirai, Sadafumi Tomida, Kazushi Ikeda, Masaru Sasago, Masayuki Endo, Sigeru Hayama, Noboru Nomura:
Three-dimensional resist process simulator PEACE (photo and electron beam lithography analyzing computer engineering system). IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 10(6): 802-807 (1991)

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