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F. R. Ashley

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1970 – 1979

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1970
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F. R. Ashley, E. B. Murphy, H. J. Savard:
Device photolithography: A computer controlled coordinate measuring machine. Bell Syst. Tech. J. 49(9): 2193-2202 (1970)
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F. R. Ashley, E. B. Murphy, H. J. Savard:
An automated micro measurement system for integrated circuit masks. DAC 1970: 17-27

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