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G. Borsoni

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2001
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G. Borsoni, N. Béchu, M. Gros-Jean, Michael L. Korwin-Pawlowski, R. Laffitte, V. Le Roux, L. Vallier, Névine Rochat, C. Wyon:
Ultra-thin oxides on silicon fabricated using ultra-slow multicharged ion beams. Microelectron. Reliab. 41(7): 1063-1066 (2001)

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