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Paul G. Carey

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1980 – 1989

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1988
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Ettore Landi, Paul G. Carey, Thomas W. Sigmon:
Numerical simulation of the gas immersion laser doping (GILD) process in silicon. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 7(2): 205-214 (1988)

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