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Samuel F. Wilderson

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2004
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Samara L. Firebaugh, Harry K. Charles Jr., Richard L. Edwards, Allen C. Keeney, Samuel F. Wilderson:
Optical deflection measurement for characterization of microelectromechanical systems (MEMS). IEEE Trans. Instrum. Meas. 53(4): 1047-1051 (2004)

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