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Se-Hyeon Ryu

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2023
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Seongjin Oh, Tae-Yong Kim, Jongpil Jeong, Chae-Gyu Lee, Yongju Na, Se-Hyeon Ryu:
A Novel XY-Plane Positioning Based on Point Approximation for Wafer Stage Control. BCD 2023: 108-113

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