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V. A. Lisiewicz

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2004
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Jon L. Ebert, Dick de Roover, La Moyne L. Porter, V. A. Lisiewicz, Sarbajit Ghosal, Robert L. Kosut, Abbas Emami-Naeini:
Model-based control of rapid thermal processing for semiconductor wafers. ACC 2004: 3910-3921

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