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Juergen Kuehnle

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Conference and Workshop Papers

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2022
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Yvonne Bergmann, Michael Leippert, Juergen Kuehnle, Johannes Kristan, Sven Erik Jeroschewski, Lukas Römer, Paul Knaus, Axel Wogawa:
An IoT Solution for Condition Monitoring of a Lithography Coater Tool in a Semiconductor Fab. ICPS 2022: 1-6

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