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Eric Ken Yong Teo

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2021
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Tze Chiang Tin, Saw Chin Tan, Hing Yong, Jimmy Ook Hyun Kim, Eric Ken Yong Teo, Ching Kwang Lee, Peter Than, Angela Pei San Tan, Siew Chee Phang:
A Realizable Overlay Virtual Metrology System in Semiconductor Manufacturing: Proposal, Challenges and Future Perspective. IEEE Access 9: 65418-65439 (2021)
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  persistent URL:
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Tze Chiang Tin, Saw Chin Tan, Hing Yong, Jimmy Ook Hyun Kim, Eric Ken Yong Teo, Joanne Ching Yee Wong, Ching Kwang Lee, Peter Than, Angela Pei San Tan, Siew Chee Phang:
The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing. IEEE Access 9: 114255-114266 (2021)

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