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Iris Mäge

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Conference and Workshop Papers

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2005
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Karina Grundke, Astrid Drechsler, Nicole Petong, Cornelia Bellmann, Manfred Stamm, Odo Wunnicke, Jens Reichelt, Iris Mäge, B. Pinter, T. Pearce, M. Voigt:
On the Effect of Cationic Surfactants in the Rinse to Reduce Pattern Collapse in High Aspect Ratio Patterning of Photoresists. ICMENS 2005: 14-15

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