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T. Pardoen

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2007
[i1]
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  - https://dblp.org/rec/journals/corr/abs-0711-3332
D. Fabrègue, Nicolas André, T. Pardoen, Jean-Pierre Raskin:
New Internal Stress Driven on-Chip Micromachines for Extracting Mechanical Properties of Thin Films. CoRR abs/0711.3332 (2007)

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