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Teck-Yong Tou

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Journal Articles

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2006
[j2]
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Kah-Yoong Chan, Teck-Yong Tou, Bee-San Teo:
Thickness dependence of the structural and electrical properties of copper films deposited by dc magnetron sputtering technique. Microelectron. J. 37(7): 608-612 (2006)
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Kah-Yoong Chan, Teck-Yong Tou, Bee-San Teo:
Effects of substrate temperature on electrical and structural properties of copper thin films. Microelectron. J. 37(9): 930-937 (2006)

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