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Dirk Lewke

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2010 – 2019

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2016
[c2]
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  dblp key:
  - conf/ieeesensors/BiasioKRBCLS16
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  persistent URL:
  - https://dblp.org/rec/conf/ieeesensors/BiasioKRBCLS16
Martin De Biasio, Martin Kraft, Michael Roesner, Christoph Bergmann, Maria Mercedes Cerezuela-Barreto, Dirk Lewke, Martin Schellenberger:
Direct optical stress sensing in semiconductor manufacturing using Raman micro-spectrometry. IEEE SENSORS 2016: 1-3
2011
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  - conf/wsc/MattesKLMS11
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Andreas Mattes, Matthias Koitzsch, Dirk Lewke, Michael Müller-Zell, Martin Schellenberger:
A virtual equipment as a test bench for evaluating virtual metrology algorithms. WSC 2011: 1888-1897

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