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W. Merlijn van Spengen

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Journal Articles

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2003
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W. Merlijn van Spengen:
MEMS reliability from a failure mechanisms perspective. Microelectron. Reliab. 43(7): 1049-1060 (2003)
2002
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Ingrid De Wolf, W. Merlijn van Spengen:
Techniques to study the reliability of metal RF MEMS capacitive switches. Microelectron. Reliab. 42(9-11): 1789-1794 (2002)

Conference and Workshop Papers

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2014
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Federico Buja, Jaap Kokorian, Anirudha V. Sumant, W. Merlijn van Spengen:
First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls. NEMS 2014: 77-80

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