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Anton K. Pfau

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1993
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Edward W. Scheckler, Nelson N. Tam, Anton K. Pfau, Andrew R. Neureuther:
An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 12(9): 1345-1356 (1993)

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